Deep Dive Global

China’s Semiconductor Manhattan Project: Billions Poured into EUV & Chip Autonomy


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China's Semiconductor Strategy Overview.
Goal:
80% self-sufficiency by 2030.
Method:
State-mandated use of 50% domestic equipment in fabs.
Massive state subsidies to offset low yields & high costs.
Key Progress Areas:
Hybrid Bonding: HPD-30 development.
Plasma Etching: Sub-5nm capabilities achieved.
Major Bottleneck: Lithography.
US/EU export controls block advanced EUV machines.
Workaround: DUV with SAQP for sub-7nm nodes.
Consequence: Extremely low yields (30-35%), financially unsustainable without subsidies.
EUV Development Paths:
Multiple, concurrent projects to create domestic EUV systems.
- Alternative light sources (LDP, solid-state lasers).
- Radical SSMB project (particle accelerator).
Target: Commercial 5nm EUV by 2028.
Challenge: Transitioning from prototype to high-volume, defect-free manufacturing.
China's semiconductor industry is aggressively pursuing 80% self-sufficiency by 2030, driven by state-backed mandates and massive investment. This push involves forcing fabs to use at least 50% domestic equipment to accelerate R&D through guaranteed real-world testing. Key domestic companies are making rapid advances in critical technologies like hybrid bonding (e.g., HPD-30) and advanced plasma etching for sub-5nm nodes.
However, the industry faces significant bottlenecks, particularly in lithography due to export restrictions on advanced EUV tools. Chinese foundries are using complex, costly workarounds like SAQP with DUV machines, resulting in low yields (30-35%) that are financially unsustainable without heavy state subsidies.
Concurrently, China is pursuing multiple, divergent paths to develop domestic EUV capabilities, including alternative light source technologies (LDP, solid-state lasers) and radical approaches like the SSMB project using a particle accelerator. The goal is commercial 5nm EUV systems by 2028, but this timeline is challenged by the immense complexity of moving from prototypes to high-volume, defect-free manufacturing. The effort mirrors a "Manhattan Project" scale, placing intense pressure on engineers and operating under a strategic, cost-blind industrial policy focused on autonomy over immediate profitability.
✅Youtube video:https://www.youtube.com/watch?v=QdqUhGpm8iA
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Deep Dive GlobalBy deepdiveglobal